Coatings
PIK2 Ultra Q-Kote
Twin-wire-arc and plasma coatings are as vital to low defect densities as critical cleaning. With the right coating – one that has been specifically engineered for your process environment – kit life can be dramatically increased, while reducing particles. We have developed groundbreaking coatings that have significantly impacted our clients’ production capabilities, and we apply every coating robotically, to ensure the most repeatable process.
Our coatings are some of the most advanced in the world. Each coating is engineered to provide precise film characteristics of thickness, density/porosity, roughness, adhesion strength, and purity level. The advanced Q-Kote coatings, created by Pentagon Technologies, have contributed to double or triple kit lifetimes by precise engineering of film characteristics. Our materials engineers have developed coatings for most process chamber kits, and they continue to pursue formulations that benefit every chamber process.
To assure that our coatings are within purity tolerances, we routinely check samples to assess the levels of each element. Additionally, we check the levels of all contaminants in our tools and plants on a regular basis.
All twin-wire-arc and plasma coatings are applied robotically, enabling each part to be coated in the most accurate, repeatable way. No part is shipped until we have established that all the criteria – including roughness, thickness, surface profile and particle level – of each coated area meets or exceeds recommended tolerances.
Every one of the millions of parts we service each year is examined using Pentagon Technologies QIII+® Surface Particle Detector to no greater than 3.9 particles per cm2 at 0.3µ – the most precise measurement available today.
When intelligently designed kit parts and coatings are used, it’s possible to increase effective kit life by 200-300%, lengthening preventive maintenance cycles and increasing tool efficiency. But coating efficacy also depends on process kit conditions and tool utilization. The Pentagon Kit Management™ program will allow you to take full advantage of the highly specialized cleaning, coating and refurbishment services we offer, while reducing and stabilizing costs. Our kit management services, combined with our meticulous continuous improvement program, will ensure that your chamber reaches its full potential.