Repair & Assembly
Your process tool isn’t ready to run without the repairs and assemblies that can have a critical impact on how well your tool works. Precise metrology, assembly, refurbishment and leak checking are time-consuming, complex processes, but they can significantly extend green-to-green time for your tool and increase productivity in your chamber. You need the confidence that comes from years of performing repairs and inspections on thousands of parts. When you add the Pentagon Technologies team to your workflow, you add unmatched experience and expertise to your enterprise.
We repair and refurbish every part of the process kit, including heaters, valving, traps and lid assemblies. After servicing, each part undergoes a comprehensive inspection process, ensuring that it meets our rigidly developed specs.
Helium leak detection, resistivity assessments, pressure tests and other critical measurements need to be performed for various parts during each PM to ensure that your tool will work predictably. But these tests are time-consuming, and the repair and testing process may need to be repeated several times to achieve specific tolerances.
Pentagon Technologies provides process control and predictable outcome to minimize the downtime that repairs and testing create. Our specialized technicians perform these difficult procedures routinely, on a wide variety of parts. Their results are added to a continually growing database, allowing us to craft a process of record (POR) for each part and to constantly review and improve all of our procedures.
Precise metrology ensures that the thickness, roughness, torque, and efficacy of each part meet the tolerances you specify – and those parts that don’t are replaced. This level of process control means that you will be able to more accurately predict costs and stabilize chamber operations.
And, or course, every part is analyzed by the Pentagon Technologies QIII+® Surface Particle Detector to no greater than 3.9 particles per cm2 at 0.3µ – the most precise measurement available today – before it is double bagged in cleanroom-compatible packaging and shipped.
When our assembly and refurbishment services are combined with cleaning and coating as part of our Pentagon Kit Management™ suite, tool uptime is increased, chamber productivity is enhanced, and costs decrease while they become more predictable.
We provide assembly service for many different parts and tools, including:
- AMAT Producer Lid rebuild
- AMAT P5000 Lid rebuild
- Valving
- MRC wafer holders
- WJ Injectors
In addition to cleaning and coating, our technicians can repair many kinds of parts. Our repair capabilities include:
- Ceramic Coatings (TEL DRM, SCCM)
- Electrodes (TEL, LAM)
- Flatness
- Roughness
- Particles, metallics
- Heaters (AMAT TxZ, DxZ, Novellus Altus)
- Uniformity
- Leak rate
- Particles
- Backside Pressure
- Quartzware
- Chips
- Re-Anodize